Tokyo Electron (TEL) is pleased to announce the return to production of its MERCURY™ MP batch spray cleaning system as a complement to our flagship ZETA™ system. MERCURY is a proven technology with over 1,000 systems installed worldwide.
Supporting 75mm – 200mm wafers, the MERCURY was only recently retired as the industry moved towards 300mm and single-wafer cleaning. With the surge in 200mm wafer manufacturing due to the emergence of the IoT market, MERCURY once again represents a lower-cost option for our customers.
Toshihiko Nishigaki, President of TEL FSI stated, “We are excited about the new growth in this market segment and our immediate ability to provide customers the right solution with this return of our industry proven MERCURY systems.”
TEL’s ZETA and MERCURY batch spray systems are process-optimized cleaning tools that allow you to become highly flexible and productive – replacing the buildup and mess of dated ashers, wet bench stations and peripheral rinsing/drying equipment with a single tool that etches, strips and cleans in one safe, space-conscious footprint.
Please visit us at the TEL booth #1029 at SEMICON West, or contact your TEL account manager to learn how TEL batch spray cleaning solutions are ideally suited for today’s Internet of Things (IoT) marketplace, and provide solutions to maximize yields, minimize excursions and downtime, and boost productivity.
ZETA and MERCURY are trademarks or registered trademarks of TEL FSI, Inc. in Japan and/or other countries.