Gigaphoton Research Department Technical Advisor Dr. Akiyoshi Suzuki Receives the “SPIE Frits Zernike Award” and CTO Dr. Hakaru Mizoguchi Is Elected as Fellow

Outstanding achievements in the industry and significant contributions
to the Society are recognized

(Head Office: Oyama, Tochigi; President & CEO: Katsumi
Uranaka), a manufacturer of light sources used in semiconductor
lithography, announced that the International Society for Optics and
Photonics (SPIE) has awarded Dr. Akiyoshi Suzuki, Technical Advisor to
the Gigaphoton Research Department, the “SPIE Frits Zernike Award in
Microlithography”, and elected Dr. Hakaru Mizoguchi, CTO and Vice
President, as SPIE Fellow.

The Frits Zernike Award, founded in 2002 by SPIE (a major academic
society for lithography technology), is a prestigious award, often
spoken of as the “Nobel prize of the lithography world”, and named in
honor of Dr. Zernike, who received the Nobel Prize for Physics in 1953
with the phase-contrast microscope, and who has had a major influence on
lithography technology. The award is presented only to those who have
demonstrated particularly outstanding achievements in the industry, and
while there have now been 14 recipients, Dr. Suzuki is the first
Japanese winner. The award for Dr. Suzuki honors his achievements over a
career of more than 40 years, with contributions made to all manner of
technological innovations in optical lithography equipment, including
contact exposure machines, 1: 1 scanners, g-line, i-line, KrF steppers,
KrF / ArF / immersion scanners, EUV exposure machines, and NIL, and
extending from the dawn of the era up to the present day.
Suzuki offered the following comments: “I think the fact that a person
from industry has received an award from the academic association, SPIE,
is proof that the lithography technology that we research and develop
has a strongly scientific dimension, and that it plays a major role in
our challenging high-tech industry. I would like to express my gratitude
to all those with whom I have worked. ”

In addition, Gigaphoton Vice President and CTO, Dr. Hakaru Mizoguchi,
was elected as a SPIE Fellow – an honor given to persons who have
contributed to lithography technology over many years. The title was
awarded in acknowledgment of Dr. Mizoguchi’s approximately 30 year
record of developing advanced products, ranging from DUV lasers (KrF /
ArF / F2) to EUV light sources, and his contribution of over
100 manuscripts supporting this. The election of a Fellow as a light
source engineer also represents a world first. Furthermore, with the
election of Dr. Mizoguchi, and the inclusion of alumnus, Shinji Okazaki,
three of the six Japanese Fellows of the Society involved with
lithography now have links to Gigaphoton.
Dr. Mizoguchi commented,
“I take my election as Fellow to be an acknowledgement, not simply of my
contributions through manuscripts, but of the efforts made by all staff
and associates of Gigaphoton in transforming those written ideas into
actual products. I would like to share my gratitude with everyone here
and thank you once again. I hope to devote myself both to advancing
technological development and nurturing the next generation, so as not
to discredit the title of Fellow.”

*February 25 – The award ceremony for Dr. Suzuki and Dr. Mizoguchi will
take place at “SPIE Welcome and Plenary Presentations”.
28 – Dr. Suzuki and Dr. Mizoguchi will deliver lectures at the
“GIGAPHOTON-SPIE Lunch Session”.


Since it was founded in 2000, GIGAPHOTON has delivered valuable
solutions to semiconductor manufacturers throughout the world as a laser
supplier. In every stage from R&D to manufacture, sales, and maintenance
services, GIGAPHOTON is committed to providing world-class support
delivered from the perspective of everyday users. For more information
please visit www.gigaphoton.com


Media contact:
Corporate Planning Division
TEL: +81-285-37-6931
E-mail: [email protected]


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